Used KLA / TENCOR 2135 / 2138 #129087 for sale

KLA / TENCOR 2135 / 2138 is a mask & wafer inspection equipment designed to identify defects on integrated circuits (ICs). Its state-of-the-art optical system and image processing capabilities enable the unit to inspect wafers and masks at a high resolution. Its highly sensitive CCD camera is able to detect and measure pattern elements in order to spot defects quickly and accurately. KLA 2135 / 2138 can detect edge features, linewidths, gate/contact patterning, within and between features, spacings, notches, and other defects. It is also able to measure the alpha pitch, the alignment of the layers, the overlay amount, and the dimensional tolerances. Additionally, the machine has the capability of characterizing defects quickly and completely using API's (applications programming interfaces) for custom automation. TENCOR 2135 / 2138 has a fully integrated metrology tool with an advanced 7-axis stage which allows the asset to access any area of the sample with variable-speed motions. The capabilities of 2135 / 2138 include fast inspection, high accuracy, high sensitivity, and high reliability. Additionally, the model can perform automated image acquisition and analysis of defects as well as defect review and classification. The software of the equipment supports multiple operating modes including single layer, flatbed, multi-layer, and OCR (Optical Character Recognition) support. The system also has a large variety of options for specific application needs including enhancement and edge options, metrology and overlay capabilities, advanced defect classification and complexity analysis, and optional interface packages. Overall, KLA / TENCOR 2135 / 2138 is a comprehensive mask & wafer inspection unit designed to identify defects on ICs. It provides a high resolution imaging machine with advanced and variable-speed motions at a high accuracy and sensitivity. It also comes with a variety of software features, so users can customize the tool for their specific applications.