Used KLA / TENCOR 2135-IS #293620770 for sale

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ID: 293620770
Wafer Size: 8"
Vintage: 2000
Brightfield wafer defect inspection system, 8" Process: Metrology Process module Control rack Dual load Y-axis controller nonfunctional 2000 vintage.
KLA / TENCOR 2135-IS is a high-performance, high-yield, mask and wafer inspection equipment with advanced imaging, analysis and reporting features. This system offers a variable-sized field of view and provides outstanding image resolution in both brightfield and darkfield imaging. KLA 2135-IS unit can detect the smallest defects on complicated masks or wafers with the help of its illumination machine, enhanced high-dynamic-range imaging, laser pattern recognition, and unique multi-view imaging techniques. The advanced imaging techniques used by this tool allow for high-quality, defect-centric image analysis. The asset has multiple detectors including a 1.3 Megapixel, 8-bit CCD array detector and a 50 Megapixel, 12-bit CCD array detector. The 1.3 Megapixel CCD array detector has deep levels of sensitivity for high-resolution imaging that is suitable for inspection of critical geometries, while the 50 Megapixel CCD array is used for larger wafers with more complex patterns. Due to their large detector size and imaging capabilities, these detectors provide the capability to detect and analyze the smallest of defects even on large-sized wafers. One of the main features of TENCOR 2135-IS is its multipoint UV and infrared laser pattern recognition. This feature provides precise mapping of laser-defined overlay features and process layers on the wafer and enables real-time comparison of wafer images to predetermined reference images and thereby enables efficient detection of defects. The model also has a high-speed defect capture equipment that enables fast, automated, defect characterization and classification of mask or wafer images. The user can easily access, remove, store and categorize defects within the system. In addition to its defect detection capabilities, this unit also has a suite of powerful data analysis and reporting tools that let the user generate detailed reports with various statistical indicators such as defect size, type, location and severity. Overall, 2135-IS machine offers a complete mask and wafer inspection solution that is designed to provide high-performance, high-yield results. The tool helps manufacturers and fabs ensure high-quality product consistency and meets the demanding needs of volume manufacturing.
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