Used KLA / TENCOR 2135 #198385 for sale

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ID: 198385
Wafer Inspection system, 1998 vintage.
KLA / TENCOR 2135 is a leading-edge cost effective mask and wafer inspection equipment for semiconductor fabrication that is designed to handle a wide range of production inspection tasks,offering unsurpassed speed, repeatability and accuracy. KLA 2135 combines standard alignment, sensitive optical inspection and data analysis functions in a product that provides the ultimate package in quality assurance. TENCOR 2135 features automatic defect detection, substrate alignment, and serialization ID reading. These features enable the mask and wafer inspector to precisely and accurately inspect substrates at high speed. The sensitive optical inspection capabilities enable the system to detect and analyze even the smallest defects on the wafer or the mask. 2135 has a customizing feature which allows operators to set specific product parameters. These parameters include measurements of wafer pattern size,x-y position mis-registration,magnetic heads/gaps,pattern distortion and other quality characteristics. These customized settings enable KLA / TENCOR 2135 to efficiently and accurately perform high quality inspections. KLA 2135 also has the ability to collect and store data regarding the inspected parts. This data can then be used to create an accurate record of product quality. The valuable information can be used to help improve process conditions and quality control. TENCOR 2135 has several cost-saving features that make it one of the most cost effective mask and wafer inspection systems on the market. For example, the unit uses significantly less power stimulation than other systems. Additionally, the machine reduces tool costs through its use of field replacements for optical elements and optimization of the calibration process. 2135 is highly modular and configurable allowing it to be scaled to a customer's needs. This makes it a versatile and reliable platform that can be used from small pilot line runs to large volume production. Overall, KLA / TENCOR 2135 is an advanced mask and wafer inspection platform that provides extremely accurate, reliable and repeatable inspections with minimal setup costs and fast turnaround times. It is an ideal tool for semiconductor fabrication plants that require high speed and reliable inspections.
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