Used KLA / TENCOR 2135 #9252720 for sale
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ID: 9252720
Wafer Size: 8"
Wafer inspection system, 8"
DOS Operation system
Ranom and array mode
Wafer loader and stage, 6"
(2) Open cassettes
System backup drive
SAT Function is valid
Fully safety inter locks
Fully exchaust fan
Switch and button
Joystick
Console panel
Cover
Holder.
KLA / TENCOR 2135 is a mask and wafer inspection equipment from KLA and TENCOR. It is an advanced system offering high-speed, high-resolution and high-accuracy inspection of both mask photomasks and semiconductor wafers. The unit features a dual capacitance charged coupled device (CCD) camera for imaging masks and wafers, providing high-resolution images of up to 2125 nm in pitch with fast 400 ns exposure time. It also features two light emitting diode (LED) systems, operating in two different wavelengths, matching the absolute pitch of the product, and providing consistent detection of even the most difficult defects. KLA 2135 is designed to facilitate zero-defect production of leading-edge semiconductor devices. It offers a powerful inspection process with in-depth analysis to detect and classify defects, and to map connections between similar defects across multiple mask layers. The machine also features a special advanced defect analysis (ADA) tool, using darkfield and brightfield imaging to quickly and accurately identify critical defects, including print-through defects. Additionally, TENCOR 2135 provides innovative pattern recognition algorithms to detect pattern shifting and line width variation, helping to preserve vital design integrity. To maximize productivity, 2135 offers fast downloading speeds, real-time image processing, automated die inspection and real-time evaluation of product defects. Through a graphical user interface (GUI) with touchscreen support, the tool allows users to easily set up processes, access data and manage the inspection of multiple wafers concurrently. KLA / TENCOR 2135 is brought to life by an intuitive and friendly user-orientated GUI and special advanced software features. Its easy-to-use features allow operators of any skill level to quickly benefit from its advanced performance capabilities. In conclusion, KLA 2135 is high-performance mask and wafer inspection asset for semiconductor industries, providing high-precision imaging at fast speeds with powerful defect analysis features. Its advanced features and user-friendly capabilities make it ideal for high-volume production demands.
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