Used KLA / TENCOR 2138 XP #293792053 for sale

KLA / TENCOR 2138 XP
ID: 293792053
Wafer Size: 6"-8"
Vintage: 1998
Wafer inspection system, 6"-8" Dual open cassette CIM: SECS / GEM Robot Line conditioner Fan module Inspection station No ADC Station No ISMF Controller Chuck type: Low contact chuck Line conditioner: 18 KVA, 50 A, 3 Phase Power requirement (IS Module): 208 VAC, 3 Phase WYE, 50/60 Hz Power requirement (UI Module): 208 VAC, 3 Phase WYE, 50/60 Hz Operating system: Windows NT 1998 vintage.
KLA / TENCOR 2138 XP is an advanced mask and wafer inspection equipment designed for high-performance imaging and defect detection in semiconductor manufacturing processes. This system combines cutting-edge technology with a user-friendly interface to provide accurate and reliable inspection results for critical photomask and semiconductor wafer applications. KLA 2138 XP utilizes a sophisticated optical unit that enables high-resolution imaging of microscopic features on masks and wafers. The machine is equipped with multiple light sources, such as brightfield, darkfield, and oblique illumination techniques, to enhance image contrast and maximize defect detection sensitivity. Additionally, the tool features advanced optics, including high numerical aperture lenses and specialized imaging filters, to achieve superior image quality and resolution. One of the key strengths of TENCOR 2138XP is its versatility in handling various types of substrates and materials. The asset is compatible with a wide range of mask and wafer sizes, including 200mm and 300mm wafers and standard mask sizes used in semiconductor fabrication. It can also accommodate different types of substrates, such as silicon, glass, and compound semiconductor materials, making it suitable for a diverse set of applications in the semiconductor industry. In terms of defect detection capability, 2138 XP offers a comprehensive suite of inspection modes and algorithms to identify and classify defects with high accuracy and precision. The model utilizes advanced image processing and machine learning techniques to analyze collected images and differentiate between true defects and process variations. It can detect a variety of defects, including particles, pattern defects, and overlay errors, ensuring high yield and quality in semiconductor manufacturing. KLA 2138XP also features an intuitive software interface that provides users with extensive control over the inspection process. The equipment offers customizable inspection recipes and automated recipe setup tools to streamline the inspection workflow and improve productivity. Users can easily adjust imaging parameters, defect classification criteria, and inspection strategies to meet specific application requirements and optimize inspection results. Moreover, KLA / TENCOR 2138XP is equipped with advanced data management capabilities to store and analyze inspection results efficiently. The system can generate detailed defect maps, histograms, and trend analyses to track defect trends over time and facilitate process improvement. It also supports seamless data integration with other process tools and manufacturing systems, enabling comprehensive process control and monitoring in semiconductor production environments. Overall, 2138XP represents a state-of-the-art solution for mask and wafer inspection in semiconductor manufacturing. With its advanced imaging technology, versatile substrate compatibility, robust defect detection capabilities, and user-friendly interface, this unit delivers high performance and productivity for critical inspection applications in the semiconductor industry.
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