Used KLA / TENCOR 2139 #9390473 for sale
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ID: 9390473
Wafer Size: 8"
Vintage: 2000
Wafer inspection system, 8"
UI+IS
Computer
Hard Disk Drive (HDD)
Floppy Disk Drive (FDD)
Keyboard
Operating system: Windows XP Version
Exhaust
Line conditioner
2000 vintage.
KLA / TENCOR 2139 is a mask and wafer inspection equipment for detecting defects on semiconductor wafers. The system combines an automated optical inspection unit with wafer handling and advanced multi-tool analysis capabilities to provide ultra-fast, non-destructive evaluation and defect characterization of various types of masks and wafers. The machine features an automated environment that includes high-resolution auto-focusing, wafer loading and unloading, and high-accuracy multi patterning support. The hardware utilizes large fields of view to identify defects up to 8µm on a defect-free wafer. To further enhance defect detection capabilities, the tool can utilize advanced contrast modulations and advanced algorithms to detect a diverse range of failure modes. KLA 2139 offers automated defect characterization capabilities, which includes automated sketching, measurement of Physical shapes, topology and image pattern analysis that helps to quickly and precisely identify various defects. Along with this, the asset offers data transfer and storage for capturing raw images from the defect inspection process, providing customers with high-fidelity defect images. The model is also capable of running automated recipes, which allows customers to reduce the amount of time it takes to analyze wafers or masks. This also eliminates the need for manual intervention while performing automated defect inspection. The equipment also features advanced defect analytics capabilities that enables fast and accurate detection of yield-limiting defects. To ensure reliable and accurate data, TENCOR 2139 provides automated system calibration and monitoring options, ensuring that unit performance is maintained and complete customer confidence in the machine is achieved. Furthermore, it provides support for control that covers light, background, high voltage, detectors, and synchronization between different optics and image sensors. Overall, 2139 is an advanced, automated optical inspection tool for the semiconductor industry, offering ultra-fast defect detection and the ability to utilize advanced algorithms and analytics to accurately characterize and quantify defects on masks and wafers. As such, it is an invaluable tool that helps semiconductor manufacturers remain competitive.
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