Used KLA / TENCOR 2351 #9251384 for sale

KLA / TENCOR 2351
ID: 9251384
Wafer defect inspection system.
KLA / TENCOR 2351 is an automated mask and wafer inspection equipment designed to detect physical defects and contaminants on integrated circuit (IC) masks and semiconductor wafers. The system can measure patterns and individual components on IC masks and wafers such as transistor gates, overlays, and interconnections. The unit uses a combination of differential interference contrast (DIC) optical imaging and automated programmable pattern recognition algorithms to inspect the components on the mask or wafer. The machine is designed to inspect surfaces of up to 12-inch wafers or masks and can be easily integrated into an IC fabrication line. The images obtained by the DIC imaging are first sent to the tool's integrate processing unit for further analysis. This processing unit is able to detect flaws, as well as other surface variations, such as scratches, blemishes, and contamination. In addition, the asset includes a user-friendly graphical user interface (GUI). This allows the user to customize the inspection parameters and the algorithms used for testing. For example, the user may choose to inspect a certain portion of the wafer or mask at different contrast levels or in different regions. Moreover, the user is able to customize the model to detect critical defects such as wire shorts and open circuits or to inspect smaller features such as contact vias and pads. Additionally, KLA 2351 can identify pattern shifts and degradations. It can also detect particle contamination on the wafer or the mask. This equipment is equipped with a high-resolution lens to accurately capture and analyze small features down to 0.4 microns. Moreover, it is capable of capturing images of reflective surfaces with less than 0.2% reflectivity. Overall, TENCOR 2351 system is an effective tool for analyzing integrated circuits masks and wafers for physical flaws, contamination, and other irregularities. With its programmable patterns recognition algorithms, user-friendly GUI, and high-resolution imaging capabilities, this unit is an ideal choice for automated IC inspection and analysis.
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