Used KLA / TENCOR 2360 IS #9187557 for sale
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ID: 9187557
Wafer Size: 8"
Vintage: 2001
High-resolution imaging inspection system, 8"
Dual open wafer handler
User interface
Line conditioner
Distribution board
Rack for user interface
Signal tower
Case for Jig tool
(2) Parts boxes
(3) Cables
Key board & mouse
Joystick
Duct
Spacer
2001 vintage.
KLA / TENCOR 2360 IS is a robust mask and wafer inspection equipment designed to meet the demands of foundry and advanced logic manufacturers. Its advanced algorithms and sophisticated optics systems allow it to accurately identify and measure the critical features on masks and wafers with unprecedented speed and precision. Its full mask inspection capability provides high-accuracy defect detection, including line edge roughness (LER) measurements, with an accuracy of one nanometer. Its light-source-based inspection technology detects microcontamination antireflective coatings (MARCs) and thin films, as well as local defects on the mask. The system also performs automatic defect classification, ensuring that process-induced defects are identified and filtered out, reducing the overall false-alarm rate. Its wafer inspection features include advanced automated defect isolation, mapping, and interface to defect review tools, enabling quick analysis of defect patterns. The unit also features low-noise, multi-pixel imaging, allowing it to detect defects that can be missed with single-pixel sensitivity. It also offers high-speed, high-resolution wafer overlay metrology, neural net classification, and defect-tracking algorithms for further precision. KLA 2360 IS includes an automated optical inspection (AOI) machine that allows for comprehensive inspection of wafers and other substrates. This tool features automated pattern matching and spot inspections for footprint, line width, critical dimension (CD), overlay, and collapse inspection, enabling manufacturers to reduce yields and costs. Furthermore, its flexible source architecture is capable of accommodating different levels of vision correction, including out-of-focus and front-surface appearance analyses. TENCOR 2360 IS provides advanced automation systems for setup and to aid in process planning. Its auto-calibration features can be used to quickly and accurately tune the asset to the job-specific requirements. This saves time and cost by eliminating the need for manual calibration. Its user-friendly GUI also allows users to configure and operate the model with minimal training. Overall, 2360 IS is a powerful and precision-crafted equipment that provides an invaluable level of performance and efficiency for mask and wafer inspection. With its advanced algorithms, sophisticated optics, and comprehensive automation, it is one of the market's best mask and wafer inspection systems available.
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