Used KLA / TENCOR 2360 #293606935 for sale

KLA / TENCOR 2360
ID: 293606935
Brightfield inspection system.
KLA / TENCOR 2360 is a mask and wafer inspection equipment designed to detect and identify defects on challenging patterned geometries. It offers high-precision automated inspection with high-speed data analysis and improved throughput. The system is highly configurable, with a range of integrated modules designed to meet the needs of various applications. The main components of KLA 2360 are its image sensor, chromatic imaging technology, and optics subsystems. The image sensor consists of a variable number of line scan cameras which record a two-dimensional image of the inspected patterned geometry. The chromatic imaging technology processes this image data and isolates potential defect features using a variety of algorithms. Once potential defect features are identified, the optics subsystem evaluates the features and confirms their presence or lack thereof. TENCOR 2360 also features a range of advanced automated detection options such as automatic device classification and feature identification, process control parameters, data extraction algorithms, and a wide range of reporting options. Additionally, users can customize their unit to fit their exact application needs with options such as resolution and field of view settings, image enhancement software, programmable logic controllers and feature parameter extraction. The machine can detect a range of defects as small as 0.2 microns, as well as complex geometry patterns, contaminations and bridging. Its advanced imaging and optics subsystem enables minimization of false defect detections and improved defect isolation, while its powerful data analysis allows capturing and processing of massive amounts of information in real-time. 2360 allows direct connection to a range of host control systems and provides a straightforward setup, installation and operation process. The tool is designed to support concurrent multiple systems and its user console can be split in two for two simultaneous users. Additionally, the asset's components are serviceable and upgradable. In conclusion, KLA / TENCOR 2360 is a highly configurable and automated model designed to detect a range of defects, with reduced false defect detection and improved data analysis capabilities. It allows for a straightforward setup and operation process and provides a range of options and features for customized applications.
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