Used KLA / TENCOR 2365 #9251385 for sale
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KLA / TENCOR 2365 mask and wafer inspection equipment is a highly automated, high-accuracy imaging tool designed to facilitate a wide range of automated inspection tasks. The system is equipped with various state of the art features that enable high-speed, high-resolution imaging, analysis, correlation and recognition tasks. KLA 2365 features a full range of image acquisition modes including multi-field, multi-contrast imaging, strobing, dark field and a variety of other advanced imaging techniques. The unit can be configured to enable automated alignment of the mask substrate, enabling scanning speeds up to 500mm/sec. In addition, the lens design is configured to provide a small working field and a very high resolution of down to 1μm. TENCOR 2365 has an integrated image analysis suite, complete with advanced tools for both fuzzy defect detection and exact defect recognition. The tools enable rapid, automatic correlation and recognition tasks. This includes the ability to find, detect and recognize imagery of numerous objects, including particles, scratches, scratches and high, low, dual-side defects all within a single CCD imaging cycle. 2365 also features real-time, online defect review and list editing capabilities. This enables performance monitoring and improvement on the live product without a post-inspection review step. KLA / TENCOR 2365 mask and wafer inspection machine is designed to meet the needs of advanced semiconductor device inspection markets. With its features, including multi-field, multi-contrast imaging, strobing, dark field and a variety of other advanced imaging techniques, the tool stands out as one of the most comprehensive and accurate mask and wafer inspection solutions available.
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