Used KLA / TENCOR 2367 #9206183 for sale
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ID: 9206183
Wafer Size: 12"
Vintage: 2006
Inspection system, 12"
Carrier ID readers
OS: Windows 2000 SP4
HSMS / GEM Semi E37 compliant ethernet interface:
HSMS (E5 / E30 / E37)
GEM/SECS Automation interface (E4 / E5 / E30)
SEMI E84
SEMI E116
Hokuyo sensors for use with:
Overhead transport (OHT)
Basic automation package: E39, E87, E90 (Carrier management/wafer tracking)
Advanced automation package E40. E94 (Process job, control job)
InlineADC
ITF
Load port UI
MDAT
Mixed mode
NFS Data transfer
Spatial population analysis:
Power options
Array segmentation
Patch images: 64x64
Pixel perfect
RBB
RBMT
Sensitivity tuner
NPA
Interface data transfer DVD-R ethernet
Hardware optic:
BB Visible pixels (0.62 mm, 0.39 mm, and 0.25 mm)
BB/I-Line/G-Line UV pixels (0.20 mm, 0.16 mm, and 0.12 mm)
Edge contrast
1600 MP PS Image computer
Array / Random modes
High mag review optics
Anti-blooming TDI
High resolution review camera
2006 vintage.
KLA / TENCOR 2367 is a mask and wafer inspection equipment that combines the best of optical and image sensor technology to deliver superior visualization and defect detection. The system includes two independent 6 axis stage emulators for mask and wafer inspection. It also has a UV light source for brightfield, darkfield, and UV imaging. It has automated, programmable illuminators for imaging at multiple frequencies and integrated backgating capability. The Mask Inspection Unit (MIS) has an 254mm field of view for true area inspection at high magnifications. It features advanced 3D capabilities, such as view stitching and wavefront metrology, for precise inspection and overlay capability. The machine can also identify and capture clear images of small defects such as surface contamination and particles. The Wafer Inspection Tool (WIS) is a self-contained asset that can be customized for each application. The model includes a high-resolution imaging camera and wide-field optics for defect detection, as well as multiple illuminators for surface imaging. The WIS also includes a multi-touch display and graphical user interface for intuitive operation. KLA 2367 is a reliable equipment for mask and wafer inspection. It offers programmable controls and automated sequencing for fast, accurate screening. It also features advanced analytics technology to identify small defect types and easily transferable images. The system is user-friendly and inspects products with high cost of downtime and error. TENCOR 2367 is an excellent solution for mask and wafer manufacturing, and semiconductor industry. It inspects products through the most advanced technologies available today and is an invaluable tool for increasing efficiency and quality. With its powerful features and flexibility, the unit can easily detect and capture both sub- and surface-level defects in a short period of time. It offers superior support for automated and manual operations, helping ensure the highest quality outcomes for any project.
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