Used KLA / TENCOR 2367 #9293245 for sale

KLA / TENCOR 2367
ID: 9293245
Inspection system.
KLA / TENCOR 2367 mask and wafer inspection equipment is an advanced automated wafer and mask inspection system designed to rapidly and accurately analyze semiconductor manufacturing processes. It utilizes a fully automated and integrated instrument, software, and optics unit to detect visual and metrology defects on semiconductor wafers with greater accuracy and speed than traditional inspection methods. KLA 2367 inspection machine is equipped with advanced features such as a high-resolution wafer overview camera, automatic optical positioning (AOP), as well as patterned and defect recognition tools. The full-field imaging subsystem utilizes an optical beam splitter and CCD camera to achieve superior image resolution and pattern recognition while minimizing camera distortion. This ensures that any defect can be detected more quickly and easily than with traditional inspection technology. TENCOR 2367's powerful AOP feature allows for extremely accurate substrate alignment within 0.25μm of the target position. Furthermore, the tool has the capability of identifying different types of defects through the use of defect recognition algorithms and image processing. The pattern recognition tools enable the asset to detect defects based on different patterns, such as defects that have gone undetected through traditional inspection methods. The model also provides measurement and analysis of critical features, such as the geometrical distances between neighboring features, variation from intended shapes, and distances between device features from multiple perspectives or point of views. To perform more detailed analysis, 2367 also offers an advanced metrology package with features for both accurate and precise measurements. The equipment's quantitative analysis tools enable defect tracking and evaluation as well as feature/structure characterization. Furthermore, the system also offers a feature analysis tool that can detect feature size and shape variations with extreme accuracy. Overall, KLA / TENCOR 2367 mask and wafer inspection unit is a robust automated inspection machine that can help semiconductor manufacturers reduce their cost of ownership and increase profitability. The tool's advanced features and powerful analysis tools allow for faster and easier defect detection while providing excellent accuracy and precision. In this way, KLA 2367 ensures quality control in the semiconductor manufacturing process.
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