Used KLA / TENCOR 238 #9091298 for sale
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ID: 9091298
Wafer Size: 6"
Vintage: 2001
Reticle inspection system, 6"
2001 vintage.
KLA / TENCOR 238 is a high-precision mask and wafer inspection equipment designed for the semiconductor industry. The system is designed to detect defects on semiconductor wafers and masks during the pre-lithography process. It is capable of detecting accuracy within 12nm, while its high speed operation allows for up to 25,000 wafers to be inspected per hour. KLA 238 combines several innovative inspection technologies to deliver precise measurements. Its built-in conductive alignment unit efficiently detects pattern defects on the wafer's edge for uniform die placement. An image processor featuring a pseudorandom binary sequence (PRBS) algorithm precisely detects and isolates defects within nanometer-level resolution. The machine also uses a patented high-speed protuberance detection (HPD) setting to identify surface-level defects, such as scratches, pits, and small particle contaminants. TENCOR 238 can detect particle contaminants between 2 and 12µm, and is equipped with a data transfer and communication module for direct data integration with existing factory automation networks. This tool also features a unique pass/fail flagging algorithm that helps reduce false positive detections. The asset's compact design makes it easy to deploy in any semiconductor production environment. Its high-dynamic flat is capable of reaching a maximum misalignment of ±6σ, allowing for repeatable, orderly device profile inspections. The model's enhanced imaging capabilities ensure complete coverage of each wafer surface, with all 50 percent of each field-of-view captured and inspected. 238 also includes a convenient PC-based data management interface, offering users real-time defect data analysis. Overall, KLA / TENCOR 238 is a reliable and precise inspection equipment that combines several innovative technologies. Its unique detection capabilities and data integration technology simplify semiconductor production, allowing for accurate and comprehensive inspections.
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