Used KLA / TENCOR 238 #9395887 for sale

ID: 9395887
Reticle inspection system.
KLA / TENCOR 238 Mask and Wafer Inspection Equipment is an automated inspection system designed specifically for the semiconductor industry. The unit provides fast and accurate inspection of alignment mark positioning, mark measurements, and other pattern overlay requirements of critical wafer level features. It is capable of inspecting features on both edge and pattern edged dies, including 0.18 micron devices. The machine's automated inspection tool provides high throughput and high accuracy combined with a range of inspection capabilities for wafer level features. It combines superior flexibility with ease of programming and can quickly inspect alignment of die and container features and other critical alignment mark positionings. KLA 238 consists of a dual source optics asset with both brightfield and darkfield illumination, enabling automated inspection of both positive and negative patterns on both silicon dies and container features. The model has a multi-axis stage with a fast 8.5 Hz image frequency and accuracy of 1 micron, making it suitable for high precision applications. The equipment is capable of detecting images of specifically targeted features; for example, measuring the position and size of alignment marks. It can compare overlays between various levels, and can even measure small features such as sub-micron structures. TENCOR 238 system is integrated with advanced software, enabling it to easily interface with other manufacturing systems. It has a flexible, intuitive user interface, and can easily and quickly be programmed for inspection of a variety of features. The unit also features a range of quality control and defect management procedures. It has both manual and automatic defect analysis capabilities, allowing it to detect even difficult-to-find defects. The machine can identify irregularly shaped defects, misaligned or missing features, and other potential defects at wafer level. Overall, 238 Mask and Wafer Inspection Tool is a powerful and reliable tool for finding defects during the manufacturing process. It provides fast and accurate inspection of wafer level features, and helps ensure product quality through its sophisticated defect detection and quality control processes.
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