Used KLA / TENCOR 2410 Viper #293592063 for sale
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ID: 293592063
Macro defect inspection system
Boards included
Parts have been removed:
Robot / Robot controller
Vacuum reserve tank.
KLA / TENCOR 2410 Viper is a mask and wafer inspection equipment designed to maximize production accuracy and quality. It is an automated in-line wafer-inspection system designed to enable cost-effective inspection of device layers, providing high resolution imaging and defect analysis. KLA 2410 Viper can determine the presence and absence of critical defects to enable fast rejection of out-of-specification parts. The unit offers superior image acquisition resolution and high speed image capture, automated image capture and processing, and repeatable results. TENCOR 2410 Viper is equipped with a state-of-the-art optics machine, consisting of two ultraviolet objective lenses, four telecentric lenses, a CCD camera and three laser lines. Through scanning electron beam technology, the 2410 allows for precise-to-the-nanometer imaging capability, with resolution down to 0.5 micron. The tool has three laser lines for image capture (Optical Character Recognition, Defect Detection and Contour Scanning). The OCR line enables identification and assessment of overlay, via back-illuminated images, while its 0.5 µm imaging allows for reading features as small as 6 µm. The Defect Detection line is a high-resolution line used to identify and size defects as small as 2 µm. The Contour Scanning line assists in overlay accuracy measurement and is used to provide a 2D view of any die defects. 2410 Viper also boasts automated addition and referencing of 100s of field-of-views in one tool without the need for manual calibration. It is also capable of automated defect classification, image clustering and frame to frame comparison, allowing it to identify the same defects in successive images. KLA / TENCOR 2410 Viper can provide rapid, repeatable results, even over a large group of wafers, to help ensure a fast throughput and minimum downtime. Furthermore, KLA patented wafer-inspection algorithms improve accuracy, resolving risks and reducing device yield loss. By combining precise and repeatable results, KLA 2410 Viper is the ideal asset for inspecting modern, high-density semiconductor chips.
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