Used KLA / TENCOR 259 #9308196 for sale
It looks like this item has already been sold. Check similar products below or contact us and our experienced team will find it for you.
Tap to zoom
Sold
ID: 9308196
Vintage: 1990
Reticle inspection system
Part number / Description
710-039524-00 / API
710-022370-01 / CTI Filter
710-022400-01 / Graphics display 1
710-022370-01 / CTI Filter
710-022410-01 / Graphics display 2
710-023602-00 / Display system trap
710-023279-00 / 4/16 Level dump board
710-036380-00 / Parameter 2
710-029767-00 / Universal phase lock loop
710-028001-00 / Image memory
710-028014-00 / Image memory address
710-028001-00 / Image memory
710-039524-00 / AP 1
710-028001-00 / Image memory
710-028014-01 / Align data buffer address
710-028001-00 / Image memory
710-023236-00 / Scan delay
710-037717-00 / Diskette controller
710-013838-00 / Universal video mux
710-101836-02 / Auto focus, high voltage
710-023596-00 / Align error detect
710-023273-00 / 512K Multi-bus memory
710-037718-00 / SBC
710-023599-00 / Computer interface III
710-028287-01 / Servo driver 4
710-039924-00 / Servo driver 3
710-028078-00 / Servo driver 2
710-023589-00 / Servo driver 1
710-023450-00 / Detector data
710-023455-00 / Detector compare
710-023450-00 / Detector data
710-039320-00 / GC 16 2x2
710-023665-01 / Detector 4
710-023046-00 / Detector 3
710-023041-00 / Detector 2
710-022833-03 / GC
710-036420-00 / Defect concatenator
710-023256-00 / P3 Data input
710-023595-00 / P3 Align error detect
710-037887-00 / BMMC
710-023596-00 / P3 Align error detect
- / Power Supply, -15 V
- / Power Supply, +15 V
- / Power Supply, ±5 V
- / Power Supply
- / Power Supply, +12 V unregulated
- / Power Supply, -5 V
- / Power Supply, +12 V
060-013170-00 / Compumotor driver
- / Camera
- / 740-036411-00 / Floppy drive
- / Left / Right, top illumination assembly
750-101830-00 / UV Power supply
- / +5 V Power Supply
- / Keyboard assembly
- / (3) Mask Holders, 5"-6"
- / 740-029546-00 / ±28 V Supply
- / 780-042686-00 / Y Encoder scale
- / 780-042685-00 / X Encoder scale
- / Machine optics
- / Mask holder stop
730-011012-00 / Separation motor
- / 36 mm Lens and shields lamp housing
760-039742-00 / Ergonoc LWD
710-029921-00 / Preprocessor I/O
710-029924-00 / Preprocessor I
710-029927-00 / Preprocessor II
710-029924-00 / Preprocessor I
060-039367-00 / Theta drive motor
- / Top illumination solenoid and mirror
- / ND Wheel Assembly
- / X encoder head
- / X Lead screw
- / Encoder head Y
712-042631-00 / Keypad left
712-042632-00 / Keypad right
- / Sight scope assembly
710-102570-02 / (2) Pre amplifiers
- / Optics auto focus
- / (2) Fiber optics bundles
- / X limit sensors, left / Right
1990 vintage.
KLA / TENCOR 259 is a powerful, high-precision mask and wafer inspection equipment used in semiconductor production applications. The system is designed to automatically inspect both masks and wafers for defects with unparalleled accuracy and speed. KLA 259 features an advanced dual sensor unit that utilizes high-resolution CMOS digital imaging with back illuminated LED illumination. The autofocus ensures a clear image that is ideal for both top-down and bottom-up inspections. Additionally, the single wafer machine includes back dielectric profiler (BDP) measurement, providing up to ten times higher resolution than conventional optical systems. The tool's integrated image analysis capabilities allow for automated inspection of such features as die cracks, voids, micro-mapping, overlay, imaging, patterning, line width measurement, edge rounding, bumping, and thickness related issues. The image filters employed include contrast-enhanced die and overlay features, plus defect recognition algorithms to detect smaller problems for a higher level of accuracy. TENCOR 259 is equipped with a 12-inch projection asset, enabling a larger inspection area and allowing for more efficient processing of large masks and wafers. The model also includes an automated wafer handling equipment, allowing for automated movement, loading, and unloading of wafers to maximize throughput. The system also includes advanced statistical data analysis tools for further unit optimization. Product parameters, such as average die size, uniformity, and spread, are calculated from the measured data and used as feedback for recipe generation and product optimization. 259 offers ultimate automation of the entire inspection process, from wafer loading to report generation, resulting in higher yield and machine throughput. In conclusion, KLA / TENCOR 259 offers a powerful, high-precision mask and wafer inspection tool, providing industry leading accuracy and speed. The asset features advanced dual sensors for extremely clear imaging, automated wafer handling, and advanced statistical data analysis for optimal performance. KLA 259 is an ideal choice for any semiconductor production environment looking to increase throughput, lower cost of operation, and increase overall model efficiency.
There are no reviews yet