Used KLA / TENCOR 2606 #199591 for sale

ID: 199591
Vintage: 1992
Defect Review Station, parts system, 1992 vintage.
KLA / TENCOR 2606 is a leading-edge mask and wafer inspection equipment designed to detect defects in semiconductor wafers and masks. With its included Interchangeable Reticles Adaptor and optical source, it offers an unparalleled level of accuracy and resolution. KLA 2606 utilizes a combination of telecentric optics and proprietary algorithms to detect and locate faulty areas with extremely low false-alarm rates. TENCOR 2606's telecentric optics are notable for their ability to cast an even light pattern over the entire specimen. This eliminates aberrations caused by alternating distances from the light source, allowing for a precisely focused inspection. Simultaneously, the system's z-axis drive moves the specimen through a controlled motion that ensures an accurate scan, while a dual-stage filter quickly eliminates any unnecessary background noise. Accurate measurement data is essential to ensure the optimal performance of integrated circuits. 2606 takes into consideration the effects of mask topography, patterns, and distortion in order to identify the most precise parameters. It enables, for example, the ability to measure edge placement to a fraction of a micron, and thus ensure the highest quality of the manufactured products. KLA / TENCOR 2606 can quickly scan large areas of wafer mask substrates, while simultaneously offering a cost effective solution. The unit is equipped with a 200-megapixel Area Array Camera, an image capture mechanism that operates at full speed without interruption. It utilizes four 12-bit ADCs that reduce complex images to accurate digital information, making it an ideal choice for machine designers in the fabrication of Ultra Large Scale Integrated circuits (ULSIC). KLA 2606 is the perfect companion for high-speed production line inspection. Easy to use, the tool offers a variety of programming options allowing the user to customize the inspection process for a range of application. The asset's automation capabilities enable quick setup and adjustment, while sequential analysis allows saving time. All of these features make TENCOR 2606 an indispensable tool for the development of modern semiconductor technology.
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