Used KLA / TENCOR 2800 #9192128 for sale

KLA / TENCOR 2800
ID: 9192128
Bright field inspection system.
KLA / TENCOR 2800 is a sophisticated mask and wafer inspection equipment for defect detection and particle imaging. It is an automated system that combines advanced optics, lighting, imaging and software technologies to give exacting results. KLA 2800 offers two-dimensional or three-dimensional images with precise measurements of particle diameters, count, size and shape down to the nanometer range. The unit divides the inspection area into a number of sub-areas and inspects each one for defects. It is equipped with an image processing algorithm for defect recognition and classification, high resolution Cameras with backlighting, a slanted lighting machine to detect small and large defects, precise sample handling and precise adaptive non-uniformity correction. TENCOR 2800 is capable of very high-resolution imaging, capable of capturing both topography and geometry of defects. It can also detect particles on two sides of the wafer simultaneously, due to its highly sensitive optics tool and automated chip-sample handling systems. It measures and profiles particle size and shape, and compiles shape parameters for further analysis. Moreover, it is equipped with a fast defect sizing algorithm which has the capability to measure dimensions of defect accurately, within a fraction of a wavelength of the visible light beam. The processed images are presented with color-coded overlays to show the exact locations and severity of defects. 2800 proves to be a very intuitive asset with easy-to-gang graphics. It is designed to deliver fast and accurate data, while maintaining a steady platform. It features full model automation, integrated with at-line process control systems, to maximize process performance. KLA / TENCOR 2800 allows for fast defect data acquisition and analysis resulting in increased efficiency and yields. Its high resolution imaging delivers detailed capabilities in identifying small defects and particle artifact sizing. Its accuracy and repeatability ensures reliable measurements are taken for make decisions that improve yields and decrease costs.
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