Used KLA / TENCOR 2835i EFEM #9230778 for sale

KLA / TENCOR 2835i EFEM is a high-performance, automated mask and wafer inspection equipment that delivers high-resolution, high-throughput, and accurate defect detection. This system provides advanced inspection efficiencies and unprecedented yields over both traditional and automated microscopes. Its state-of-the-art combination of optics, mechanics and advanced image processing algorithms provide reliable and accurate defect identification, while at the same time increasing wafer processing throughput by a factor of ten over traditional methods. KLA 2835i EFEM's key features include: high throughput automated inspection, the capability to scan over 20 wafers simultaneously, four adjustable columns for desired angle, and high duty cycle of up to 1200 wafers per hour. The unit is also able to set reference images for high-magnification consumer POV applications, as well as a fast 3D Point of View (POV) scan capable of reaching up to 10um resolution. The 2835i also features a dual-camera machine which provides automation and accuracy for evaluating micron-scale particle and defect characterization. It's onboard automatic E-Beam Defect Management (EDM) tool allows engineers to rapidly inspect wafers and extract defect features and data directly to image files. The asset also integrates KLA patented Background Noise Reduction (BNR) feature, which allows for more accurate surface and defect levels, resulting in greatly improved wafer yields. TENCOR 2835i EFEM is a powerful and innovative inspection model that is designed to meet and exceed all customer requirements. The equipment's superior performance is complimented by it's easy-to-use software interface and expandable system configurations, allowing users to customize their unit to their particular needs. With its advanced image processing features, intuitive user interface, and automated defect analysis capabilities, 2835i EFEM is the perfect tool for mask and wafer inspection.