Used KLA / TENCOR 3200-1225-03B #9294183 for sale
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KLA / TENCOR 3200-1225-03B mask and wafer inspection equipment is a high performance tool capable of inspecting wafers for defects, enabling rapid and accurate adjustment of the position of dies on a mask or wafer for lithography processes. The system is designed to inspect wafers with a line width of 25 µm to 1.2 mm, and feature measurements with a +/- 0.25 µm accuracy. The unit includes an 8 inch die to mask repeatability of +/- 0.05 mm x 0.12 mm, a 12 inch die to mask repeatability of +/- 0.04 mm x 0.13 mm, and a multilayer in-die repeatability of +/- 0.02 mm x 0.06 mm. KLA 3200-1225-03B machine is equipped with a high speed dual probe laser scanner with a step and repeat plotting algorithm. This scanning and plotting tool can move the laser beam quickly across the entire surface of the mask or wafer and accurately detect and process defects. The asset then uses KLA proprietary Optical Character Recognition (OCR) technology to identify and measure features on the mask or wafer for comparison to reference standards. In addition, TENCOR 3200-1225-03B model is equipped with specialized imaging and tracking software, allowing for portable registration technologies to ensure precise alignment of masks to wafers and vice versa. This technology ensures proper placement and exact alignment of pattern data, solving the problem of offset pattern generation. The unique slanted edge design of 3200-1225-03B equipment further contributes to its accuracy, as it is able to accurately trace internal pattern layout. KLA / TENCOR 3200-1225-03B also offers state-of-the-art data analysis and reporting tools, which collect and produce comprehensive reports on inspection results. This enables customers to make real time adjustments to production operations, ensuring the highest levels of quality assurance. In conclusion, KLA 3200-1225-03B mask and wafer inspection system is a highly advanced tool capable of offering a wide range of data collection and analysis capabilities. It is designed for precise and accurate mask and wafer inspection, providing customers with the assurance of high quality products.
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