Used KLA / TENCOR Archer 10 XT #9276259 for sale
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ID: 9276259
Wafer Size: 12"
Vintage: 2005
Overlay inspection system, 12"
2005 vintage.
KLA / TENCOR Archer 10 XT is an advanced mask and wafer inspection equipment designed to achieve fast, precise, and reliable inspection. It features a proprietary, high-resolution optical system, 10x magnification, and an integrated wafer motion technology, enabling submicron-level accuracy. A combination of rapidly advancing technologies results in an efficient and precise unit for inspecting mask and wafer defects. KLA ARCHER10XT utilizes 6-different laser confocal imaging for detailed imaging of critical areas on the mask and wafer. It has a high-throughput imaging capability and is able to detect defects down to 4 microns in size. This is done through a combination of several technologies; including an advanced illumination machine that features two laser heads; a green and a red laser. The contrast present between these two laser wavelengths allows for image analysis and defect detection. The imaging tool is integrated with an optimized algorithm that extracts defect signals from the image data. This algorithm is capable of handling up to 85,000 pixels per second to provide more accurate and speedy analysis of the collected data. Additionally, TENCOR ARCHER 10XT is integrated with a powerful Software Analysis Suite that features an automatic defect detection and classification module. This module can detect and classify defects accurately and quickly, providing real-time defect analysis, sorting of defects, mask scan review, and real-time statistical assessment. In addition, KLA Archer 10 XT features a user-friendly, intuitive graphical interface that enables quick and easy navigation through its robust collection of features. The interactive user interface also provides help files and a comprehensive set of tools to assist in the operation of the asset. Furthermore, its compact design makes it simple to install and maintain, with minimal downtime required. Overall, TENCOR ARCHER10XT is an extremely fast, precise, and reliable mask and wafer inspection model. Its combination of superior optical performance, outstanding image acquisition capabilities, and advanced software analysis suite makes it suitable for both high-volume and precision inspection needs. The equipment's intuitive user interface ensures a rapid learning curve, and its compact size allows easy installation and maintenance.
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