Used KLA / TENCOR Archer 10 XT #9379085 for sale
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KLA / TENCOR Archer 10 XT is a high-performance, automated mask and wafer inspection equipment designed to meet the advanced lithography needs of the most demanding semiconductor production processes. The system features an advanced optical imaging and inspection unit which provides high resolution imaging detail and precise analysis of patterns and defects on wafers and masks. The machine includes an integrated color image processing camera that captures both brightfield and darkfield images to enable accurate detection of defects. KLA ARCHER10XT also has a number of integrated metrology tools, including dual energy microscopy and a range of automated defect classification tools. These tools provide a high level of accuracy for inspecting critical features such as lines and spaces, sidewall angles, and isolations. The tool also has precise measurement capabilities for error map analysis, including overspray, particle deposition, and photoresist residue. It also features advanced automation capabilities, allowing process engineers to program automated, custom inspection routines with minimal user intervention. In addition, TENCOR ARCHER 10XT has a range of optional features which include an auto alignment asset for accurate wafer orientation and a combination scatterometry/annular dark field model for improved detection of mask defects. It has a robust metrology architecture that is built around three independent measurement axes, providing a high level of accuracy and repeatability. It also features a user-friendly, touchscreen graphical user interface for easy navigation. TENCOR ARCHER10XT combines tried and tested KLA imaging and inspection technologies with a range of high-performance machine features, providing a reliable and comprehensive solution for mask and wafer process control. It is designed to run at high throughput, helping to reduce cycle times and increase productivity. With its advanced feature set and reliable performance, KLA Archer 10 XT is an ideal tool for semiconductor production processes.
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