Used KLA / TENCOR Archer 500 AIM #9353831 for sale
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ID: 9353831
Overlay inspection system, 12"
CIM: SECS and GEM
Handler system
(3) FOUP
2013 vintage.
KLA / TENCOR Archer 500 AIM is a powerful yet cost-effective mask and wafer inspection equipment, designed for high-sensitive defect detection and accurate defect characterisation. Equipped with advanced optical, ultraviolet and electron beam imaging, the system provides detailed data and comprehensive analysis of the mask and wafer for a comprehensive understanding of any possible defects. The unit is available in two hardware configurations — the Archer 500 and the Archer 500G. The Archer 500 supports single wafer inspection, while the Archer 500G supports both single wafer inspection and substrates up to 12 inches in diameter for the most complete analysis. This allows for a wide range of substrates to be inspected with the highest accuracy. The Archer 500 and 500G both feature a powerful 4x optical and 5x ultraviolet imaging. The powerful 4x optical magnifying power enables the machine to detect defects down to 0.25µm in size and greater. Additionally, the high-definition imaging ensures that the exact location and characteristics of each defect can be thoroughly analysed. The 5x ultraviolet imaging enables even finer inspection, with defect sizes down to 0.2µm detected clearly and accurately. For more advanced analysis and defect characterisation, the Archer 500 and 500G also feature advanced electron beam imaging. This allows for beam-circuit inspection and gate-region analysis to ensure the most comprehensive inspection of any potential defects. Additionally, the tool is fitted with a high-resolution energy-dispersive spectroscopy asset, allowing for precise elemental analysis of any identified defects. Finally, the Archer 500 and 500G benefit from KLA proprietary AccuSc outfitting and analysis software, providing seamless integration with the model and a comprehensive suite of features for data analysis, manageability and reporting. This ensures the equipment is able to provide an accurate and comprehensive understanding of any defect or contamination present. Overall, the Archer 500 and 500G provide an advanced yet cost-effective mask and wafer inspection system, combining powerful optical, ultraviolet and electron beam imaging, with a comprehensive analysis features and AccuSc software outfitting. As such, the unit is able to provide complete defect detection and characterisation at the highest accuracy and precision.
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