Used KLA / TENCOR Archer 500 AIM #9354401 for sale

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ID: 9354401
Wafer Size: 12"
Vintage: 2013
Overlay inspection system, 12" Handler: Standard (3) FOUP Interfaces CIM: SECS and GEM 2013 vintage.
KLA Archer 500 Automated Inspection Module (AIM) is a high-speed, mask and wafer inspection equipment designed to improve yield in semiconductor fabrication processes. It is a core element of TENCOR process control solutions, providing die-level and defect inspection to enable manufacturers to meet stringent quality requirements. KLA / TENCOR Archer 500 AIM features a patented Dual Photon Absorber (DPA) detector system, which combines a broadband, frequency-doubled, diode laser with ultraviolet sensors. This combination provides best-in-class sensitivity to die-level defects as small as a few nanometers in size. KLA Archer 500 AIM is also equipped with a high-resolution 'green' laser to measure features and check for periodic pattern variations in the print. The unit is optimized for automated in-fabrication use, providing support for high-volume production by quickly processing up to 360 wafers per hour. The large 18" wafer support allows for optimal throughput for both standard wafers and ultra-thin wafers. TENCOR Archer 500 AIM offers superior inspection performance with low downtime, thanks to its highly reliable optical platform. Its high-precision image-based focus technology maintains constant laser focus for up to 150 wafers in a queue. And to ensure complete coverage of the mask and wafer, the machine's Heuristic & Cell-Based algorithms calculate the best way to inspect a region. Archer 500 AIM also offers advanced data analysis and reporting capabilities, allowing users to generate reports with in-depth insights about wafer and die-level defects. It features Mapping and Defect Analysis software to show the exact location, size, type, and pattern frequency of defects. This information is critical in helping manufacturers identify and address faults in the fabrication process. KLA / TENCOR Archer 500 AIM's unique combination of features and fast processing time makes it the ideal solution for semiconductor manufacturing companies looking to maximize their yield and ensure the highest quality standards.
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