Used KLA / TENCOR Archer 500 #293610056 for sale

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ID: 293610056
Vintage: 2013
Overlay inspection system 2013 vintage.
KLA / TENCOR Archer 500 Mask & Wafer Inspection equipment provides operators with high-performance solutions for their inspection needs in semiconductor applications. KLA Archer 500 is a high-throughput, high-lateral-resolution system designed to meet the exacting standards of the semiconductor industry. The unit is capable of inspecting post-etch, single-device masks at resolutions up to 5.5 micrometers, as well as double-device masks and opaque masks up to 1.75 micrometers. It has superior machine throughput, providing integrated image acquisition and analysis times of only 10 seconds per die. This is achieved through a combination of powerful multi-core architecture, automated scan modes, and an advanced optics tool. At the heart of the asset, a proprietary opto-mechanical design propels the model with 0.4 micrometer resolution across a full field of view at up to 1,400 fps. The 4-quadrant reticle alignment is achieved with precision 0.4 micrometer stepper motors. The equipment incorporates an X-Y translation platform with a high-precision Z-axis mechanism and an advanced digital x-y-z coordinate scanning system. The unit is equipped with a high speed galvanometer-based laser beam and laser detection optics, allowing it to analyze and compare the characteristics of up to 109 diagrams of a given device and to map out defects even in the most complex structures. The machine is integrated with an innovative Auto-Focus Assistant, which offers fast auto-focusing and convergent beam profiles. The Auto-Focus Assistant captures data points across the entire device field, enabling an operator to dynamically adjust the focus profile to ensure that even the smallest surface steps are accurately detected. Furthermore, an integrated suite of software provides an enhanced user experience. The suite includes an intuitive, easy-to-navigate graphical user interface, flexible mask alignment and segmentation algorithms, and sophisticated error handling, designed to optimize tool performance. TENCOR Archer 500 Mask & Wafer Inspection Asset is a powerful and reliable tool for semiconductor manufacturers and research labs alike. Its combination of high performance, easy-to-use software, and robust optics design make it a valuable and versatile asset for any semiconductor inspection application.
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