Used KLA / TENCOR Archer 5300 #9295113 for sale

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ID: 9295113
Overlay measurement system.
KLA / TENCOR Archer 5300 is a state-of-the-art mask and wafer inspection equipment used in the semiconductor industry. The system uses advanced digital imaging technology to quickly morph images of masks and wafers from the process chamber into digital form. This enables the unit to accurately search for defects or irregularities that could lead to inferior products. KLA Archer 5300 has an array of tools for wafer defect detection ranging from die-to-die pixel mapping to localized defect isolation. For mask inspections, the machine provides three-dimensional imaging capabilities for thorough defect detection. The tool features an enhanced Scanning Acoustic Microscopy (SAM) Module designed to detect small non-visible pits, scratches or other surface defects. The Advanced Contamination Detection (ACD) Module detects the presence of particles on both the front and back surfaces of wafers. The asset also includes the advanced Auto Sense technology for fully automated error correction and wafer-level defect-counting. It also has a powerful software-based microscopy interface capable of processing both macro and microphotography images. TENCOR Archer 5300 provides an easy-to-use graphical user interface to allow operators to access all of the model's features and settings. Each component of the equipment is available to be easily observed via an integrated remote imaging system. The unit is highly configurable, allowing for professional customization of all the machine's features including Speed, sensitivity, defect type, horizontal and vertical field of view as well as various other parameters. Archer 5300 is equipped with a modular wafer stage for easy sample loading and unloading as well as automatic sample alignment. In addition to the wafer stage, the tool includes a cassette adapter to accommodate wafer cassettes of various sizes and a front-end robot, perfect for in-line or off-line inspections. In conclusion, KLA / TENCOR Archer 5300 is a highly advanced mask and wafer inspection asset. With its array of tools for wafer defect detection, advanced Auto Sense and modular wafer stage, it is designed to quickly and accurately detect any irregularities that could lead to inferior products.
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