Used KLA / TENCOR Archer AIM+ #78215 for sale
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ID: 78215
Overlay inspection system, 8"
Install type: Stand-Alone
System Software Version: 3.10.06sp7
Run daily pm test: PZT P high voltage, PZT Z gain, PZT feedback
Halogen light source
Replace halogen lamp
PDA gain X, Y axis
Wafer surface focus and analysis patened
LINNIk camera uniformity, AMS camera uniformity
MPX monitoring photo excursions
CMP coherence option
Check shutter response time
GEM / SECS
Line conditioner, 60Hz
Power requirements: 208 / 230V, 3 phase / 1 phase, 50 / 60Hz
RDM recipe database manager software of measurement recipes
Archer computer CD drive, Klass computer C drive
2004 vintage.
KLA / TENCOR Archer AIM+ is a mask and wafer inspection equipment specifically designed for advanced semiconductor production environments. It combines a variety of inspection methods, such as surface and cross section imaging, focus variation microscopy, and patterned wafer imaging, to ensure quick and accurate defect detection. The inspection system provides real-time, candid feedback on mask defects and design integrity, improving process decisions and reducing yield losses. Its advanced optics feature a large depth of field and full field of view, helping to identify even the most subtle defects. The unit also features advanced resolution capabilities including Airy phase contrast and near-field imaging. KLA Archer AIM+ uses proprietary software to provide a range of automatic mask defect detection capabilities, including auto-classification of defect types, auto-triage of defect lists, auto-focusing of defect images, auto-archival of defect images, auto-review of images, and a rule editor for custom mask flow. It can specify laboratory grade optics and configurable lighting on defective areas for accurate analysis. The machine also offers a suite of user-friendly inspection tools, including a multi-site inspection mode for viewing a wafer from multiple orientations, an alternate frequency scanning mode, advanced overlay accuracy and regression tools, and an adjustable edge-offset loup factor for precise defect analysis. TENCOR Archer AIM+ is a powerful tool for advanced semiconductor production, allowing for high-precision mask and wafer inspection in minutes. Its precise, highly-intelligent detection capabilities make it an invaluable addition to any semiconductor manufacturing operation.
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