Used KLA / TENCOR Archer AIM #9276702 for sale
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ID: 9276702
Wafer Size: 12"
Vintage: 2004
Overlay inspection system, 12"
SMIF: (2) Loadports (Isoport)
GEN3 Handler
2004 vintage.
KLA / TENCOR Archer AIM is an advanced machine-vision mask and wafer inspection equipment designed to provide high-resolution, automated inspection for semiconductor mask and wafer critical layers. The system combines advanced optics and software to enable highly accurate and sensitive measurements critical for the production and design of semiconductor devices. To begin, KLA Archer AIM features high-resolution optics and imaging capabilities with an ultra-fast scan rate. This enables the unit to quickly and accurately obtain images of mask and wafer critical layers. The camera and optics combination is capable of picking up the finest details and details below the wavelength of visible light. Additionally, the machine can detect and measure small changes in the mask and wafer layers with ultra-high sensitivity to detect lithographic defects as small as 0.01µm, and detect out of spec features such as line edge roughness, line width roughness, defect density, dose-to-size, repeatability, uniformity, and more. In order to ensure accuracy and consistency in mask and wafer inspection, TENCOR Archer AIM is designed with several field-proven image processing algorithms and advanced analytical capabilities. This suite of algorithms and software are capable of detecting and measuring anomalies such as contamination, pattern deformation, and small or thin lines. Additionally, the software is multi-dimensional in that it is capable of measuring masks and wafers from any orientation, and from any angle or direction. This allows for more comprehensive inspection and analysis of critical layers. The software also features a built-in defect-review module, which allows users to more thoroughly review and analyze defects. This data can be used to generate reports, graphs and images to help identify and classify defects. The reports can then be shared with other personnel or departments for review, if necessary. Additionally, Archer AIM is configured with a user-friendly graphical user interface (GUI) that allows operators to quickly and easily configure the tool and view inspection results. Flexible hardware and software options are available to meet the requirements of specific mask and wafer inspection applications. Overall, KLA / TENCOR Archer AIM is a powerful and reliable machine-vision mask and wafer inspection asset designed to provide the highest level of accuracy and reliability.
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