Used KLA / TENCOR Archer 10 XT #9280138 for sale
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ID: 9280138
Wafer Size: 12"
Overlay measurement system, 12"
With ASYST Isoport Load port, P/N: 9700-9129-01 REV. K
Dual load ports EFEM
BROOKS AUTOMATION Handler
With pre-aligner and robot
SBC Controller
Robot controller
Signal light tower: Red / orange / green
Main body
Handler
Monitor
I/O Interface board
Floppy Disk Drive (FDD)
CD ROM Drive
Tape drive
Pneumatic box
Optic
Z-Stage
Printer
Shelf
Keyboard
Mouse
Signal light tower
Missing parts:
BROOKS AUTOMATION Robot blade, P/N: 6-0002-0999-SP
BROOKS AUTOMATION, P/N: 6-0052-0887-SP
Controller
EMO
Floatation controller
(5) Motion controllers
Computer
Shutter module
Lamp housing module
PZT Controller
DC Transformer
Hard Disk Drive (HDD)
Power supply:
230 VAC, 11.3 A, 50/60 Hz, Single phase
208 VAC, 12.5 A, 50/60 Hz, 2 Phase.
KLA / TENCOR Archer 10 XT is a next-generation mask & wafer inspection equipment designed to meet the most demanding semiconductor fabrication requirements. Developed by leading inspection technology provider KLA, the system features multiple top-of-the-line tools such as advanced pattern recognition, 3D surface measurement, digital image correlation and predictive analytics. KLA ARCHER10XT is the latest model in TENCOR family of ultrahigh-accuracy, high-speed imaging solution systems for wafer and mask manufacture, packaging, and failure analysis. Featuring an emphasis on speed, precision, and robustness, TENCOR ARCHER 10XT offers advanced imaging capabilities at resolutions up to 133nm. The unit's Scanning Electron Microscope (SEM) provides an ultrahigh-resolution digital image of items such as transistor gates and other features on a wafer. This can be done in a single scan, enabling a wide range of inspection strategies to be applied. The machine can inspect quickly and effectively, and produce detailed, accurate data that helps to identify defects or variability with unmatched speed, precision, and accuracy. KLA / TENCOR ARCHER 10XT features advanced DefectTeller™ 3D surface measurement, which measures surface roughness for unsurpassed Global CD (GCD), while identifying and mapping defects with high repeatability and accuracy. The tool's UltraArt™ predictive analytics and digital image correlation capabilities enable users to accurately and reliably measure features on their device or mask at finer detail. The asset can also be easily upgraded with additional performance enhancements, pushing the limits of wafer inspection. With KLA / TENCOR exclusive 'Swap & See' upgrade process, customers can upgrade their TENCOR Archer 10 XT without having to purchase new hardware components, allowing for maximum value and total process performance optimization. KLA ARCHER 10XT is the ideal solution for a wide range of manufacturers, from sub-wavelength devices such as smartphones to advanced-node process nodes for leading-edge semiconductor devices. The model provides outstanding defect detection, cost savings, and reliable manufacturing performance, setting a new standard for wafer and mask inspections.
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