Used KLA / TENCOR ATL-100 #293651145 for sale

KLA / TENCOR ATL-100 is a mask and wafer inspection equipment designed to quickly and accurately detect defects that could affect the performance of a semiconductor device. This system utilizes advanced, dual-view imaging technology to produce high-resolution images of mask and wafer surfaces. KLA ATL-100 inspection unit is a fully integrated, automated machine which includes TENCOR ATL-100 inspection platform, the Scanning Spot Microscope (SSM) Sensor and pcom™ automated defect review software. ATL-100 delivers superior defect detection, classification and review capabilities by combining sub-wavelength optical and Motion Vision AE algorithms with KLA renowned defect classification expertise. KLA / TENCOR ATL-100 inspection platform can inspect a variety of masks such as B-Si, polysilicon and FIB filaments and a variety of wafer technologies, including lithography, sputtering and CMP. By combining advanced optical technology and high-resolution imaging sensors, KLA ATL-100 provides full-field, grain-noise-based defect detection that covers a wide range of defect characteristics. The Scanning Spot Microscope (SSM) Sensor is an integrated optical inspection solution that uses sub-wavelength resolution to detect defects on photomasks, wafers and placement targets. The SSM sensor employs a field of view that can traverse at 1.5KHz, along with a light source that features a high-speed, high-power pulsed laser.The SSM sensor captures defect images that can be viewed and analyzed using pcom™ automated defect review software. The pcom™ automated defect review software is a fully automated defect review tool that consists of a real-time defect management, defect classification and post-processing solution. This defect review software uses unique, self-learning algorithms to reliably and accurately detect, classify and report the status of defects, providing users with a comprehensive defect picture and full-field, sub-wavelength defect detection capabilities. Moreover, the automated review capabilities of the pcom™ asset strengthens inspection quality and cost efficiency. With its integrated model of advanced optical and imaging technologies, sophisticated defect review software and intuitive user interface, TENCOR ATL-100 mask and wafer inspection equipment is an advanced, leading-edge solution. This system delivers the highest yields and accuracy while minimizing the total cost of ownership by leveraging the highest inspection accuracy, automated defect review capabilities, and expansive throughput.