Used KLA / TENCOR AWUS 3110 #9236712 for sale
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KLA / TENCOR AWUS 3110 Mask & Wafer Inspection equipment is a reliable, powerful full-field inspection system designed to improve yield, increase cost-efficiency, and enable fast and precise defect analysis for critical process control applications. The unit uses advanced, high-resolution optics, layer-based patterned measurements of optical parameters, and enhanced signal processing to offer high inspection sensitivity and improved data analysis capabilities. This means users get high-resolution images of defect sites with increased accuracy and contrast for immediate defect identification, as well as crystal clear images of device layers for improved pattern recognition. KLA AWUS 3110 Mask & Wafer Inspection Machine has an intuitive user interface enabling simple navigation throughout the tool, and features a wide range of options for inspecting different types of wafers and masks, including full-field, multi-level, and microscopic inspection. It has an accurate and highly repeatable automated focus feature, enabling fast focus measurements with real-time profiles which can be used for process optimization. It includes an advanced defect detection algorithm which rejects false defect calls, reducing inspection false-failures and production scrap. The asset's extensive measurement functions help detect subtle defects that could lead to reduced yield. An enhanced image analysis algorithm and automated defect classification model provides quick and conclusive data analysis for problem solving and process control. The equipment has a patented laser-scannable overlay layer which is used for both mask and wafer inspection to ensure data accuracy and consistency throughout the process. In addition to its powerful and accurate performance, TENCOR AWUS 3110 Mask & Wafer Inspection System is designed for maximum dependability with fast throughputs and high stability. The unit helps users reduce cycle times, improve yields, and enables faster time to market. It is capable of handling a variety of wafers, foreign material, and defect types, and is backed by highly trained and experienced technical support staff.
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