Used KLA / TENCOR CRS 1010 #9140524 for sale

KLA / TENCOR CRS 1010
ID: 9140524
Wafer Size: 8"
Offline review station, 8".
KLA / TENCOR CRS 1010 is a mask and wafer inspection equipment that is designed to perform automated inspection of semiconductor wafers and masks. The system is capable of detecting a wide range of defects on both masks and wafers such as lithographic displacement, bridging, line edge roughness, microbridging, pinholes, and natural defects. The unit features a full-fledged spectrometer that has an extended visible range from 380 to 750 nm, and is capable of inspecting even the smallest defects. Additionally, the machine also features a sensitive backlight imaging tool that allows for defect characterization at a high signal-to-noise ratio. KLA CRS 1010 also comes equipped with an integrated wafer handler for wafer loading, unloading and handling that takes place inside the vacuum chamber. This allows for accurate placement of the wafer and prevents any contamination from occurring due to the cleanroom environment. TENCOR CRS 1010 also comes with a high-resolution optics asset that allows for defect inspection over a large field of view, up to 8 mm in length and 16 mm in width. This allows for the detection of even the smallest defect. In addition, CRS 1010 is capable of inspecting masks and wafers in parallel, which drastically reduces inspection time. This model is capable of inspecting up to four wafers or masks in a single run. Furthermore, KLA / TENCOR CRS 1010 has extended image processing capabilities, including automatic defect detection, identification, and classification capabilities. This enables the equipment to quickly and accurately identify and classify any defect on a mask or wafer. Finally, KLA CRS 1010 is designed to be operated through an easy-to-use graphical user interface. This makes the system easy to set up, operate, and maintain, and ensures that any user can take full advantage of its features. All in all, TENCOR CRS 1010 is a reliable and powerful mask and wafer inspection unit that is capable of providing highly accurate results.
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