Used KLA / TENCOR CRS 1010 #9392790 for sale

KLA / TENCOR CRS 1010
ID: 9392790
Defect review system.
KLA / TENCOR CRS 1010 is a 'mask & wafer inspection' equipment that can detect defects in semiconductor wafers and photomasks. It utilizes advanced optics and an image processing system to analyze patterns in both defects and materials. KLA CRS 1010 is a fully automated unit that utilizes a number of components to provide comprehensive inspection capabilities. The main components are: an optical imaging machine, a motion stage, a camera, and a controller. The tool also contains an inspector's front-end ergonomic interface and a user software for controlling and analyzing data. The optical asset of TENCOR CRS 1010 that captures both bright field and dark field images is made up of a high-magnification microscope, a high-accuracy motorized linear stage, and a sensitive high-resolution digital camera. The optics provide 1.5 micron resolution, allowing the model to accurately detect even the smallest defects. The motion stage permits high scan speed, while also controlling the pitch, roll and yaw of the microscope to provide three dimensional image analysis. The image processing equipment of CRS 1010 analyze patterns in both defects and materials, enabling the system to provide reliable defect classification and quantification. The controller is able to direct the camera and the stage, while also handling image gathering and pre-processing, image comparison, and storing of test results. The user-friendly software of KLA / TENCOR CRS 1010 permits full automation of data analysis and reporting to quality and process control applications. It also includes built-in information such as recipe management, visual aids for design of experiments, and statistical process control. KLA CRS 1010 is a highly reliable and accurate mask & wafer inspection unit that can detect defects with a high level of precision and enable end users to optimize process capabilities. Reliable defect classification and quantification helps manufacturers significantly reduce costs associated with defects detection, while providing comprehensive traceability for reporting and analyzing.
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