Used KLA / TENCOR CRS 1010S #293830273 for sale
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KLA / TENCOR CRS 1010S is a high-performance mask and wafer inspection equipment designed to provide defect and non-defect detection capabilities. The system is capable of inspecting with unparalleled speed and accuracy to 0.2 microns. It can detect a wide array of defects, such as scratches, unevenness, particles and other non-uniformities. KLA CRS 1010S also provides high-precision detection for other production issues, such as slip and tilt, degree of flatness, chrome layer thickness, and gradient. The unit combines a number of advanced components to provide extremely reliable results. Its User Interface automatically creates user-defined calibration data which is stored in a database to ensure consistent and accurate inspection. The machine features a 500 kHz bright field on stage camera and an integrated camera controller with OneView technology to reduce image noise while providing exceptional image quality and resolution. The tool also takes advantage of the latest hot-swap phase shifting technology to increase the accuracy of phase-difference measurements, while reducing inspection time. In addition, TENCOR CRS 1010S provides advanced wafer and mask analysis tools, including step height measurements and interferometry. Through its confocal Igrade detection and analysis capability, it can identify defects on edges, as well as small, faint, and/or clear defects so they can be corrected quickly and efficiently. For tool-to-tool or technology node-to-node comparison, CRS 1010S also provides wafer-level overlay measurements. This combination of technologies and analysis tools enables the asset to process data quickly and accurately to help ensure the highest quality standards. KLA / TENCOR CRS 1010S is ideally suited for inspecting next-generation mask and wafer technologies as well a variety of substrates for device manufacturing. This model provides exceptional performance for masking, metrology, die bonding and photolithography. The powerful combination of advanced components, technologies, and analysis tools enables this equipment to deliver the highest level of accuracy and speed in inspecting mask and wafer components.
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