Used KLA / TENCOR DFIMS Handler for SP1 #9262239 for sale
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ID: 9262239
KLA / TENCOR DFIMS Handler for SP1 is a fully automated mask and wafer inspection system designed to help manufacturers identify and rectify defects before they reach the production line. The system integrates seamlessly with KLA software and hardware tools, allowing for easy integration into an existing production environment. The system uses advanced proprietary algorithms to identify and classify pattern defects automatically and monitor them during the semiconductor production process. The main components of KLA DFIMS Handler for SP1 include the Mask Inspection Module (MIM) and the Wafer Inspection Module (WIM). MIM integrates unique pattern search, pattern recognition, and defect analysis to quickly and accurately detect and classify defects within the mask artwork. It offers high performance and high accuracy over mask coordinates as small as 500nm and works both with Gray-level and Binary masks. WIM automatically inspects pattern defects on wafers at up to 30 reticles per second, with adjustable vision settings. It is based on TENCOR Autonomous Control algorithms and can also detect and classify optical defects on wafer surfaces. In addition, TENCOR DFIMS Handler for SP1 provides an array of other support features such as a wafer support module, advanced vision options, defect library creation, defect coverage economics, and interactive database management. The wafer support module provides a localized and real-time traceability of the wafers from the time they are received from the manufacturer until they are inspected at the handler. Advanced vision options such as Logarithmic Vision, Dispersion Vision, and FFT vision provide manufacturers with comprehensive inspection capabilities, while defect library creation and defect coverage economics simplify and automate the process of verifying masks and wafers. Finally, interactive database management features enable users to easily access, manage, and update their data repositories as needed. DFIMS Handler for SP1 is the ideal solution for mask inspection and wafer sorting in high-volume production environments, as it provides manufacturers with the reliability and accuracy necessary to ensure their product reaches the market on time and with zero defects. It is a cost-effective solution that is designed to ensure maximum efficiency and reliability in mask and wafer inspection.
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