Used KLA / TENCOR EAIM+ #9304331 for sale
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KLA / TENCOR EAIM+ is a mask and wafer inspection equipment that provides a reliable and accurate method of inspecting advanced photomask and bare silicon wafers at the nanometer scale. This system is an automated, full-field box-in-box metrology that offers an easy and efficient way to detect both specular and diffractive surface defects. The unit uses a combination of high-resolution imaging and automated metrology through advanced analytic algorithms to detect even minute defects which may otherwise be hidden to the eye. KLA EAIM+ machine can detect micro defects such as pinholes, dislodged particles, trenches, crossovers, and voids on the surfaces of both photomask and bare silicon wafers. TENCOR EAIM+ tool consists of a fully automated mask inspection asset, a rich feature library, a flexible inspection platform, and a standardized workflow. It is powered by advanced image processing algorithms designed to detect and quantify a range of defects with ease. Advanced pattern recognition capabilities, paired with a robust search engine, enables the model to accurately identify and classify complicated defect features. EAIM+ equipment also features an automated workflow engine for specifying, scheduling, and executing the inspection process. This helps to reduce the time and cost associated with manual inspection by automating the process and ensuring consistent and efficient results. The workflow engine also allows for easy traceability and documentation, providing detailed audit trails of the entire inspection process. Built around a modular platform, the system is also capable of running different inspection scenarios based on user-defined parameters. This makes it a very suitable option for photomasking applications of various scales and complexity. In summary, KLA / TENCOR EAIM+ is a reliable and versatile mask and wafer inspection unit that offers a range of features and capabilities geared towards ensuring the production of high-quality, defect-free photomask and bare silicon wafers. This machine is user-friendly, efficient, and accurate, and is therefore the ideal choice for rigorous and precise inspection processes.
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