Used KLA / TENCOR eDR-5210 #293639990 for sale

KLA / TENCOR eDR-5210 is a high-speed, high-precision mask and wafer inspection equipment that is designed to meet the demands of semiconductor device manufacturers. KLA eDR-5210 combines the best of KLA advanced image processing technologies, providing exceptional performance and features that ensure precise defect detection and accurate sizing across all types of devices. The system uses a variant of TENCOR Photonic Imaging Unit (PIS) technology to determine the size, shape and properties of defects, and can detect defects as small as 22 nm. At the heart of the machine is a dual illuminator, allowing for simultaneous SIMS (scanning electron microscopic and ion beam) and e-beam through-wafer (TW) inspections. The high-resolution optics allow for improved accuracy, finer feature definitions and superior edge detection. TENCOR EDR 5210 also offers an Automated Defect Detection (ADD) algorithm, which allows for rapid analysis, ensuring that difficult and hidden defects are detected. In addition, TENCOR eDR-5210 has an advanced data sharing, analysis and reporting feature, allowing for speedy and quality defect classification for operator/inspector decisions. The tool also offers automated mapping, allowing for high-efficiency production checks. The GUI and comprehensive application programming interface (API) provides seamless integration with the host computer, enabling hassle-free operation. To ensure image quality, KLA / TENCOR EDR 5210 has the capability to retain a total of 15 sets of wafer maps that features high-resolution images, together with a variety of other advanced features. These features include an 8-bit digital output capability, automatic stage origin recognition, and an anti-vibration isolation plate to reduce image shift due to vibration. Lastly, the advanced technologies and features found on eDR-5210 ensure that this asset is able to meet the highest of performance standards and guarantee superior defect detection. With its comprehensive range of image processing tools and intuitive design, the model is an ideal solution for the advanced needs of semiconductor device manufacturers.