Used KLA / TENCOR eDR-5210 #9397337 for sale

KLA / TENCOR eDR-5210 is a state-of-the-art mask & wafer inspection equipment designed for the semiconductor manufacturing industry. This system combines both optical inspection and electron-beam (e-beam) inspection capabilities, enabling highly accurate and reliable defect detection for various patterned and non-patterned layers. KLA eDR-5210 is ideal for patterned and non-patterned mask inspection and review. The automated mask & wafer inspection unit features a built-in, high-precision CCD camera and MAP software, allowing it to quickly detect subtle defects on the wafer surface and capture fine patterns on the mask images. The machine has an exposure field of view of up to 6 inches x 6 inches, and the maximum resolution it can achieve is 16 μm. TENCOR EDR 5210 incorporates state-of-the-art imaging technology, allowing it to detect and analyze a wide range of defects including line-width shrinkage, line-width overgrowth, line edge roughness, protrusions, pits, pits, bridge shorts, open circuits, and shorts. The tool has a defect sensitivity of 0.4μm, which enables it to pick up defects even in the most challenging nanometer-level device designs. Additionally, the asset is capable of analysis at various exposure levels, including darkfield, brightfield, oblique, and light transmission. The model also integrates sophisticated pattern recognition functions, such as programmable visual pattern recognition, feature-based defects detection, and automated segmentation. The equipment also features advanced processing capabilities such as fault localization, pattern shape analysis, and 3D measurements. All of this allows the system to quickly and accurately detect and identify defects. KLA / TENCOR EDR 5210 is capable of high data throughput and is highly suitable for automated defect review (DPReview) applications. It has a fast throughput speed of up to 200 prints/hour, which makes it ideal for production-line inspections. The unit is also capable of marking detected defects for easy review and classification. TENCOR eDR-5210 is reliable, simple to operate, and offers great value for money. It requires minimal maintenance, is extremely user-friendly, and highly configurable to meet specific customer requirements. As a result, the machine is a great choice for semiconductor manufacturers who need reliable defect detection systems for their production.