Used KLA / TENCOR es20 #9093683 for sale

KLA / TENCOR es20 is a mask and wafer inspection equipment that can be used to detect defects in silicon wafers. With a high resolution image sensor and automatic defect classification, KLA es20 can accurately detect even very small defects. The system uses brightfield illumination and an image sensor to capture white light images of the wafer and its defects. These images are then processed by the defect classification engine, which removes false positive defect detections and assigns a classification type to each defect. The unit features a patented defect classification engine which can detect a broad range of defect types including CD, height, dopant and particle defects. TENCOR es20 utilizes an 8-inch wafer handling machine with a 1600x1200 resolution CCD image sensor. This image sensor has an optimal numerical aperture of 0.39 and a pixel size of 0.04 micrometers, providing image resolution of 9 micrometers. The defect classification engine uses a combination of advanced algorithms and pattern recognition techniques to accurately identify defects and assign classification types. Its real-time feature allows the user to identify the actual structure of the defect, allowing faster defect classification. Es20 also features Advanced Maskless Repair (AMR) technology, which is capable of automatically repairing detected defects. The tool uses a focused ion beam (FIB) to remove the defect, allowing for automatic defect repair without the need for a costly mask set. KLA / TENCOR es20 has the flexibility to be integrated into a pre-existing production line. The asset utilizes a number of process data inputs, including display, control, communication and metrology data. This allows the operator to easily configure the model parameters and customize its operation for different defect conditions and wafer configurations. In summary, KLA es20 is a powerful mask and wafer inspection equipment, capable of detecting small defects with its high-resolution image sensor and automatic defect classification engine. Its advanced features, such as AMR technology, allow users to automatically repair detected defects without the need for costly mask sets. The system's flexibility to be integrated into a pre-existing production line also makes it an ideal choice for many semiconductor manufacturers.