Used KLA / TENCOR eS31 #9298886 for sale

KLA / TENCOR eS31 is a high-performance mask and wafer inspection equipment that enables customer needs that demand high level of accuracy and throughput. It is capable of providing nanometer-level accuracy and an unprecedented inspection speed for a wide range of semiconductor devices. KLA eS31 features an optimized optical design featuring KLA SLF optical column with Lightning module, a standardized HS statistical background, and GS1 scan capability. The SLF optical design offers excellent uniformity and image quality across the entire field of view. The patented air suspension system allows over 1M Hz of high-speed scanning with nanometer-level resolution. This allows for rapid and precise detection of defects that would otherwise have not been seen. The Lightning module offers 4 combinations of Infra-Red, ultraviolet and wafer-optical contrasts, for the most accurate inspection of any feature on a device. The HS statistical background provides a comparison between the live signals from a sample and a trusted reference surface, ensuring robust detection of contaminants and defects. The GS1 scan capability allows for inspection of semiconductor device wafers from 12-inch to 200-mils thick. The scan can cover up to 40,000mm2 in as little as 4 seconds. The unit also has a high level of automation to minimize handling needs. The software for TENCOR eS31 has a variety of features such as; auto-correlate, cluster-algorithm, flat view and Auto-View. The auto-correlate and cluster-algorithm allow for the simultaneous comparison of inspected data from multiple datasets on both the front and back surfaces of wafers. Flat view helps to determine detector strength and interpretation of signal vs. background. Auto-view enables the generation of a single view that contains masked, unpacked, scan and summary information. In summary, eS31 from TENCOR is a high-performance mask and wafer inspection machine that offers nanometer-level accuracy and throughput. With its advanced optical design, patented air suspension tool and user friendly software, KLA / TENCOR eS31 is the ideal solution for any semiconductor manufacturing need.