Used KLA / TENCOR eS32 #293665956 for sale

KLA / TENCOR eS32 is a mask and wafer inspection equipment capable of performing defect detection and diagnosis on a variety of application types. It combines advanced optical lithography and imaging technologies to identify even the most subtle process defects, such as those caused by a trapped particle or contamination. It has a resolution of 0.5 µm and can processes substrates up to 200 mm in diameter. It is also supported by a suite of defect inspection software, designed to maximize efficiency and minimize missed defects. KLA eS32 is capable of inspecting at a variety of exposures, allowing it to detect defects across a wide range of applications, from advanced lithography to photolithography, direct oxygen plasma ashing, wet etch, and more. It features a dual-telescope system which allows it to efficiently inspect both the reticule and wafer in a single exposure. It is equipped with a 9-level, high-resolution color imaging unit and closed-loop wafer movement for accurate defect sampling and accurate imaging. The machine is powered by KLA DataLink, a single software platform that provides a unified experience for the user by consolidating inspection and diagnosis capabilities within the same boundary. The DataLink is designed to push productivity levels by providing a touchless workflow with automated job setup. In addition, its hardware-agnostic architecture is optimized for seamless host control and data exchange. TENCOR ES 32 is also equipped with metrology capabilities, with a wide range of measurements made possible by the integrated metrology hardware. This includes CD-SEM and OVL auto matching for improved data accuracy. It is also pre-calibrated to minimize baseline calibration times. In addition, ES 32 comes with a wide variety of productivity features, including an intuitive UI for ease of use, real-time time-stamps for quick reporting, multipage defect transactions for quick review, and on-board customization for tailored experience. In addition, users can choose from a range of optional accessories to customize eS32's utility for any application. Overall, TENCOR eS32 is a powerful and versatile mask and wafer inspection tool capable of performing high-resolution defect detection and diagnosis across a wide range of applications. It is equipped with automated job setup and a variety of features for increased efficiency and productivity. With its advanced technologies and extensive metrology capabilities, KLA ES 32 can help reduce missed defects and ensure optimal performance.