Used KLA / TENCOR eS32 #9387246 for sale
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ID: 9387246
Vintage: 2006
Electron-Beam Defect Inspection (EBI) system
Scan boards missing
2006 vintage.
KLA / TENCOR eS32 is a sophisticated and technologically-advanced mask and wafer inspection (MWI) equipment that utilizes a high-resolution, high-speed inspection system to maximize unit throughput and time spent per sample. This machine features an automated five-axis linear motor imaging capability that enables automated sample loading and optimization, ensuring that all samples are inspected efficiently and accurately. The automated sample control ensures samples cannot be misloaded or mishandled, eliminating human-error and resulting in higher-quality inspection procedures. KLA eS32 has advanced processing capabilities, including powerful real-time analysis and specialized algorithm-based identification of perceived defects, which can be used to detect surface and subsurface defects in semiconductor devices and their features. The MWI tool is also equipped with a full-field illumination asset that is designed to reveal more detailed information on the samples that are inspected. The integrated lighting model works with the automated process stage and provides a consistent level of precision across a variety of different device substrates. In addition, the equipment is also capable of imaging entire wafers at high speed, saving time and effort while providing ultra-high resolution digital images for defect review and analysis. The system is also equipped with advanced data analysis technologies that allow for the identification of previously unnoticed features, as well as consistent defect recognition and classification. TENCOR ES 32's superior imaging capability and advanced data analysis are key components in ensuring that mask and wafer inspection is done with precision and accuracy. The combination of automated sample loading, ultra-high resolution imaging, and advanced data analysis ensures maximum throughput and excellent results for customers. This combined with its high-end components, such as its ultra-high resolution imaging tech and integral lighting unit, puts it at the forefront of industry leaders in MWI.
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