Used KLA / TENCOR eS805 #293641968 for sale

KLA / TENCOR eS805 Mask and Wafer Inspection System provides outstanding performance and reliability for defect, process, and metrology mask and wafer inspection on today's semiconductor production lines. KLA eS805 enables the development, characterization, debug, and production control essential to meeting the stringent requirements of advanced process nodes. TENCOR eS805 combines advanced in-line process control technologies including SEM imaging and superior multivariate analysis capabilities to allow customers the flexibility to develop their own recipes or leverage factory supplied recipes to inspect their devices correctly. Utilizing its Quantum Algorithm Processor (QAP) with efficient engine optimization and adjustable parameters, the system can address a wide range of process control challenges. Designed for flexible configurations, eS805 features several field-upgradeable options, such as choice of wafer size for higher productivity, High-Resolution SEM (HR-SEM) for better image quality, and High Power Laser for extra-large coverage areas. KLA / TENCOR eS805 also supports multiple peripheral devices, including the Multi-Zone Projection Objective (MZPO) for improved uniformity across various lots, as well as a Side-View Detector for sideways illumination. KLA eS805 also offers an extensive suite of software utilities, allowing customers to easily monitor yields, establish traceability of products, and quickly identify process issues. The Traceability Enhancement Tool (TET) allows monitoring of particle evolution across multiple wafers, sources, and lots. The ergonomically advanced MOTIF™ user interface features advanced algorithms for processing and presenting inspection results, including on-demand views, statistics, and displays. The system also features off-line review and analysis capabilities. TENCOR eS805 has been designed to fulfill a wide range of inspection tasks, delivering higher process control performance and data throughput at the same time. With its high resolution imaging, advanced optical systems, and sophisticated image processing and metrology tools, eS805 is an ideal choice for a wide variety of wafer and mask inspection applications.