Used KLA / TENCOR EV300 #293637905 for sale

KLA / TENCOR EV300
ID: 293637905
Defect review system.
KLA / TENCOR EV300 is an advanced mask and wafer inspection equipment designed for the semiconductor wafer fabrication industry. It offers high-speed, high-accuracy defect inspection, enabling users to quickly detect potential defects, such as scratches, particles, and contamination. The system uses a combination of advanced technologies such as long laser exposure time, high-end optical systems, and focus variation. Its advanced optics and air bearing stages ensure that the unit operates error-free, while its long-life lasers enable it to perform long-term, cost-effective inspection. KLA EV 300 is capable of detecting defects as small as one-third of the measurement pixel size, which is 0.05 micrometers—roughly half the size of a humanhair. By leveraging its proprietary inspection algorithms, the machine is also able to detect defects such as particles, electrostatic discharge (ESD) damage, exposure to light and other environmental elements. Additionally, the tool is able to detect fluctuations and defects in mask features, resulting from irregular laser illumination. Furthermore, the asset features an intuitive user interface and is capable of defect-focusing technology. This technology enhances the inspector's ability to rapidly and accurately inspect the wafer's features. The model has a high throughput capacity and offers fast defect analysis and review. It is also equipped with on-wafer wafer orientation and alignment systems, which detect irregularities and defects in the wafer fabrications. In addition, TENCOR EV-300 offers an optional contaminant monitoring equipment, which performs non-contact defect classification, as well as contamination edge detection and particle verification. This ensures that the system is able to differentiate between actual and normal contaminants. Finally, EV300 unit is highly accurate and repeatable, offering minimal maintenance and cost savings. All parts of the machine are highly reliable and backed by a warranty. To ensure optimal results, the tool is tested and certified by an independent testing laboratory. With such powerful features and reliability, TENCOR EV 300 is an ideal solution for detecting and localizing defect criticality for mask and wafer fabrication.
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