Used KLA / TENCOR Ex20XP #9200289 for sale
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ID: 9200289
Vintage: 2002
Wafer inspection system
Front end includes:
BROOKS AUTOMATION:
702-0001-01 ATR8 Robot (KLA P/N: 750-614718-000)
002-9400-04 Series 8 controller
002-7391-08 Pre-aligner (KLA P/N: 750-614710-000)
002-7800-05 200mm Load port (KLA P/N: 750-614043-000)
002-7200-14 300mm Load port (KLA P/N: 750-614044-000)
Console station:
Sun microsystems control computer (KLA 740-616732-001)
Motorola MVME 2400 PCB (KLA 740-614883-000)
MVC Sierra PCB
KLA 710-614256-002
KLA 710-611867-002
KLA 710-609995-003
(2) KLA 710-610391-000
KLA 710-610522-000
KLA 710-604769-003
KLA 710-604769-001
KLA 710-612545-004
KLA 710-607901-002
KLA 710-603180-003
KLA 710-609086-002
KLA 710-610801-001
Main body:
VARIAN Turbo-V 550 turbo pump & controller
BROOKS AUTOMATION 003-1600-18 magnatran 7 robot
Liebert datawave 1 power line conditioner
2002 vintage.
KLA / TENCOR Ex20XP is a mask and wafer inspection equipment featuring inspection and review capabilities for mask and wafer products, with superior accuracy and repeatability. This advanced system is used to ensure the quality and performance of microelectronic components like wafer masks and substrates used in the fabrication of electronic circuits. The unit features a compact design, including integrated camera for enhanced high-resolution imaging and complete automation functionality. KLA Ex20XP uses a dual incidence optical design paired with a patented MultiSense technology, which allows for a wide range of illumination modes, contrast options, and multi-level zoom to ensure a high level of accuracy and repeatability. The machine also offers advanced defect detection capability, with the ability to detect, classify, and measure defects with an accuracy of up to 1 nanometer. The tool is highly reliable, with an application-specific integrated cooling asset, modular design, and enhanced inspection flexibility. Robust temperature control and massive storage enable routine jobs to be executed with relative ease. Additionally, TENCOR Ex20XP provides advanced analysis tools, for analyzing defects trying to simulate physical testing instructions, along with an optimized workflow across multiple production areas. SensePro, a fully integrated automation model, is the integrated software in Ex20XP. This sophisticated software equipment includes a processing and archiving engine that streamlines measurement processes, allows intelligent calculation and automation of all aspects of the inspection, and provides an efficient way to store and catalogue measurements. The system is also capable of performing advanced software-level operations such as traceability, semiconductor yield analysis, defect analysis, and on-board capture. Overall, KLA / TENCOR Ex20XP is an advanced, reliable, and easy-to-use mask and wafer inspection unit, capable of performing highly accurate defect detection and analysis with great repeatability. With its robust design, integrated camera, and advanced automation feature, KLA Ex20XP is the ideal machine for any array of electronic production applications.
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