Used KLA / TENCOR FRJ CHANGER ASSY #9292415 for sale

KLA / TENCOR FRJ CHANGER ASSY is a fully automated mask and wafer inspection equipment designed to meet the most demanding requirements for efficient production of highly complex integrated circuits. The system is built around a modular dual-arm robotic handling unit that enables multiple workflows (only one job at a time) and a single robot-controlled cassette changer for loading, unloading, and changing masks and wafers between process modules. This ensures minimal delays and high throughput, even in densely loaded workshops. The chucks used by the robot are designed for easy, fast loading and unloading of masks and wafers. The machine is also equipped with a detailed user interface for mask-wafer cross referencing, alignment, and inspection. The intuitive tool interface is designed to intuitively navigate tasks to an operator. It also provides detailed images of the whole asset layout, equipment and processes used, and quality assurance reports. The model also features an integrated vision equipment, providing fast, accurate on-the-fly measurements and inspection of the mask and wafer. This helps to reduce process risks and enhances process yield. The underlying process automation architecture is optimized for the most stringent production requirements, allowing high-precision and highly automated critical process functions such as exposure, alignment and classification. This system also supports cleanroom specific features such as wafer transfer by KLA proprietary transfer-car concept, which helps reduce contamination in the process. TENCOR FRJ unit also offers an integrated metrology capability that allows high-accuracy and repeatable process control measurement. This helps to quickly and accurately fine tune process parameters in order to reduce risk and improve yields. This machine is highly reliable and easily maintainable, providing a safe and efficient way for operators to inspect masks and wafers. Its short changeover times, combined with its precise and consistent operation, make KLA FRJ CHANGER ASSY an ideal solution for continuous-flow production of masks and wafers.