Used KLA / TENCOR / ICOS ICOS T830I #293652197 for sale
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The KLA/TENCOR/ICOS KLA T830I is a mask & wafer inspection equipment designed for high quality applications. This system uses high resolution optical sensors, fast data acquisition, and a suite of powerful software for advanced analytics. KLA / TENCOR / ICOS ICOS T830I unit utilizes a 16 megapixel high sensitivity CCD array for imaging and inspection, which allows for features down to 1.75 micron to be clearly seen. This machine also features a high Numerical Aperture (NA) and high lateral resolution of 1.75 micron to ensure high image quality. Additionally, the tool is equipped with an objective lens that is optimized for imaging, featuring a high numerical aperture of 1.25 and field of view (FOV) of 12.98 mm. The hardware of KLA ICOS T830I includes multiple stages, ranging from manual xyz stages, to automated stages with vision-guided programs and closed-loop systems with precise stage alignment. The asset also has a patented dual-axis tilting module, which ensures precise wafer alignment during inspections. ICOS ICOS T830I uses advanced mask & wafer inspection software from ICOS. This software allows for detailed image analysis, precise feature recognition, and customized inspection programs. The software utilizes machine learning algorithms for automated defect recognition, which can identify a wide range of defect types and types of defects. When using TENCOR ICOS T830I, users can choose from a variety of inspection methods for optimal performance. These methods include manual inspections, automated inspections, statistical process control, design-for-testability, and other customized solutions. The combination of high-performance hardware and advanced software makes ICOS T830I a powerful mask & wafer inspection model. With its high resolution and advanced software capabilities, this equipment is ideal for use in industries such as flat-panel displays, semiconductors, electronics, and medical devices.
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