Used KLA / TENCOR / ICOS WI-2000 #293639004 for sale

ID: 293639004
Wafer inspection system.
KLA / TENCOR / ICOS WI-2000 mask and wafer inspection equipment is an innovative tool used by the semiconductor industry to detect nanometer scale defects in lithographic masks. It is capable of detecting defects down to 0.39 µm in size with an accuracy of 0.1 µm, while simultaneously finding mask anomalies and substrate topology. Furthermore, KLA WI-2000's automated feature recognition eliminates manual inspection and precise fault isolation, resulting in great process efficiency. ICOS WI-2000 comprises of multiple modules. Its first module is an optical system which is designed to deliver high-resolution images over large portions of the wafer. This unit uses a 21-inch monitor in order to display SEM images. It is composed of a microscope, a patented Dual Scan Imaging Sensor and a CCD imaging camera. Furthermore, it is designed to reduce vibration and eliminates distortion, delivering extremely accurate images to the integrated control machine. The integrated control tool then processes the images for defect- and fault-detection. It implements several algorithms, such as Maximum Entropy Method, Gray Level Correlation, Edge Histogram and Region Growing, in order to accurately and rapidly detect nanometer scale defects. Additionally, the asset is capable of identifying complex features, such as line-width, bridging, surface topology, edge roughness and intervening material. Moreover, WI-2000 boasts multiple connectivity solutions and is capable of working with CAD and CIM systems. This further increases the model's efficiency and productivity by streamlining data exchange with other systems. It also has an ultra-responsive Human-Interface, making control, monitoring and basic procedures fast and simple. In summary, KLA/TENKORTENCOR WI-2000 is an advanced mask and wafer inspection equipment, designed to detect sub-micron defects in lithographic masks with precision, accuracy and outstanding speed. Multiple modules, powerful connectivity solutions and user-friendly interface further enhances the system's performance, making it a valuable inspection tool for the semiconductor industries.
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