Used KLA / TENCOR SCD-XT #293766657 for sale

KLA / TENCOR SCD-XT is a state-of-the-art, high-powered Mask and Wafer Inspection equipment designed to maximize throughput while providing the highest quality inspection results. The system consists of an advanced beam delivery unit, optics assembly, and sensor head all engineered for superior imaging. KLA SCD-XT utilizes an advanced scanning electron beam which is guided by a Deformable Mirror (DM) technology that enables advanced pixel placement with a sharp spot size to provide an extremely high resolution inspection. This technology coupled with an advanced optical probe and position sensitive detector (PSD) provides precise and efficient image capture. The advanced beam delivery machine used on TENCOR SCD-XT ensures a high dose rate enabling a higher throughput while controlling the electron beam dose to maximize Detail Enhancement Contrast and minimize overlay. The tool also utilizes macro-variable focusing optics that enables imaging from a wide range of process levels and at all process layers. This advanced imaging technology provides circuit layer thickness measurement, overlay parameter measurement and process layer inspection to check for potential areas of concern. The optics assembly is further enhanced with high resolution micro-variable optics that are used for feature edge detection and cross sectional imaging to accurately detect and quantify feature attribute differences resulting from fabrication process variation. The asset also includes a powerful Sensor Head featuring advanced virtual alignment technology for data collection. This advanced technology allows for unparalleled accuracy and repeatability in a wide range of inspection angles. Software available for SCD-XT also provides user-friendly operation and an intuitive graphical user interface. KLA / TENCOR SCD-XT is ideal for mask and wafer inspection applications in a range of semiconductor fabrication processes. By combining advanced imaging technologies with a simple operating model, KLA SCD-XT enhances yield margins while providing superior quality inspection results.