Used KLA / TENCOR SL515 #9032013 for sale
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ID: 9032013
Wafer Size: 12"
Vintage: 2007
Mask inspection system, 12"
2 LP, 1 CHM, 1 ARM/1 LP, 1 CHM , 1 Laser
(1) Loadport (Asyst)
Loadports carrier reader: RFID type
Robot: KLA design
Light source: Coherent laser, FRED, ASSY, HP 257nm (SHG of 514nm by the BBO crystal)
Function: Inspection mask surface's haze
Components:
Power condition (for UIC)
UM
Power condition (for UM)
RLS
UIC
Operation con
Operation con (SunBlade 2000)
IAS
KLA 95i
Operation con (printer)
Parts missing:
FRU, MODULE BEAM STAB, 5XX
FRU, MODULE DIFFUSER, 5XX
2007 vintage.
KLA / TENCOR SL515 is a mask and wafer inspection equipment designed for use in the semiconductor fabrication process. This system utilizes high-resolution imaging and metrology to inspect each mask and wafer down to the nanometer scale. With its fast acquisition rate, KLA SL515 reduces inspection time and improves product quality. KLA SL515high-resolution imaging is accomplished through a digital LED light source used in combination with a 20-inch display. The display provides a clear view of the masks and wafers, and allows for easy identification of defects. The unit also features an integrated metrology machine that measures the size, shape and distribution of the defects. This data is then stored in a database for later analysis and comparison. The tool also features automated defect detection and classification algorithms that can quickly and accurately identify defects. This feature saves time and money by eliminating human inspection. The asset can also identify process control issues that can lead to costly rework and production delays. TENCOR SL 515 is an ideal solution for mask and wafer inspection as it provides fast, reliable data and excellent resolution. This model meets the stringent demands of the semiconductor fabrication process and ensures that products delivered to the customer are of the highest quality. The automated defect detection and classification algorithms also save time and money by eliminating costly manual inspections.
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